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| 005 | 20240725145759.0 | ||
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| 020 | _a1316609040 | ||
| 082 | _a621.381 JO-E | ||
| 100 |
_aJones, Thomas B. _921468 |
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| 245 | 0 |
_aElectro mechanics and mems _c Thomas B.Jones |
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| 260 |
_aNew Delhi _bCambridge _c2013 |
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| 300 | _axx; 559p | ||
| 650 |
_aElectro mechanics and mems _935365 |
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| 942 | _cBK | ||
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_c55139 _d55139 |
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