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_aRuiz, Pilar Gonzalez _920736 |
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_aPoly Sige for MEMS above CMOS sensor _c Pilar GonzalezRuiz |
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| 260 |
_aNew York _bSpringer _c2014 |
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| 950 | _o621.381 RU-P | ||
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_c53549 _d53549 |
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