| 000 | 00389nam a2200145Ia 4500 | ||
|---|---|---|---|
| 005 | 20240930110309.0 | ||
| 008 | 240930b |||||||| |||| 00| 0 eng d | ||
| 082 | _a621.38152 M464F | ||
| 100 | _aMay Gary S | ||
| 245 | _aFundamentals of semiconductors fabrication | ||
| 260 |
_bWiley India _aNew Delhi _c2004 |
||
| 300 | _a305 | ||
| 650 |
_aSemiconductors fabrication _939703 |
||
| 942 | _cBK | ||
| 999 |
_c48426 _d48426 |
||