000 00338nam a2200133Ia 4500
008 210219s9999||||xx |||||||||||||| ||und||
082 _a621.38
_bLI-F
100 _aLiu,Chang
_915228
245 0 _aFoundation of MEMS
_cChangLiu
260 _aNew Delhi
_bPearson Education
_c2006
300 _axxii,530
942 _cBK
950 _o621.38 LI-F
999 _c43387
_d43387