| 000 | 00376nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210219s9999||||xx |||||||||||||| ||und|| | ||
| 082 |
_a686.2315 _bT163P |
||
| 100 |
_aJordon, V.S. _91735 |
||
| 245 | 0 |
_aPetterning of material layers in submicron regions. _c V.S.Jordon |
|
| 260 |
_aWiley eastern _bNew Delhi _c1993 |
||
| 300 | _axii,183p | ||
| 942 | _cBK | ||
| 950 | _o686.2315 T163P | ||
| 999 |
_c2245 _d2245 |
||