TY  - BOOK
AU  - Korvink Jan G ed
TI  - MEMS a practical guide to design, analaysis and applications
SN  - 3540211174
U1  - 621.381 KO-M 
PY  - 2006///
CY  - New york
PB  - Springer
KW  - MEMS a practical guide to design, analaysis and applications
ER  -