Korvink Jan G ed <br/><br/>
MEMS a practical guide to design, analaysis and applications 

 - New york  Springer  2006 
 - xxv,965 
<br/><br/><label>ISBN: </label>3540211174 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS a practical guide to design, analaysis and applications
<br/><br/><label>Dewey Class. No.: </label>621.381 KO-M