Huang, Qing- An <br/><br/>
Micro electro mechanical systems Vol. 1 

 - Singapore  Springer  2018 
 - xxiv; 655p 
<br/><br/><label>ISBN: </label>978981105944 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micro electro mechanical systems
<br/><br/><label>Dewey Class. No.: </label>620.50688 HU-M