TY  - BOOK
AU  - Lyshevski Sergey Edward
TI  - MEMS and NEMS: systems devices and circuits
SN  - 849312620
U1  - 621.381 LY-M 
PY  - 2010///
CY  - Hydrabad
PB  - BSP Books
KW  - MEMS and NEMS
ER  -