Lyshevski Sergey Edward <br/><br/>
MEMS and NEMS: systems devices and circuits 
Lyshevski Sergey Edward 
 - Hydrabad  BSP Books  2010 
 - 461 
<br/><br/><label>ISBN: </label>849312620 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS and NEMS
<br/><br/><label>Dewey Class. No.: </label>621.381 LY-M