TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems design and manufacture
SN  - 9780070487093
U1  - 621.381 HS-M 
PY  - 2019///
CY  - Chennai
PB  - McGraw Hill Education
KW  - MEMS and microsystems
ER  -