Hsu, Tai-Ran <br/><br/>
MEMS and microsystems design and manufacture 
Tai-RanHsu 
 - Chennai  McGraw Hill Education  2019 
 - xii; 426p 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS and microsystems 
<br/><br/><label>Dewey Class. No.: </label>621.381 HS-M