Pelesko, John A. <br/><br/>
Modeling mems and nems 
John A.Pelesko 
 - New York  CRC Press  2003 
 - xxiii;357p 
<br/><br/><label>ISBN: </label>1584883065 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Modeling mems and nems
<br/><br/><label>Dewey Class. No.: </label>621.3 PE-M