Maulf Nadim <br/><br/>
Introduction to microelectronic mechanical system engineering 
Maulf Nadim 
 - 2nd 
 - Boston  Artech house  2004 
 - xx283p 
<br/><br/><label>Subjects--Topical Terms: </label><br/> microelectronic mechanical system engineering
<br/><br/><label>Dewey Class. No.: </label>621.384 MA-I