Design of mems based thin film bulk acoustic wave resonator for pcs application.

Shukla, Shashank

Design of mems based thin film bulk acoustic wave resonator for pcs application. Shukla - Dr.B.R.Amb - Dr.B.R.Ambedkar National Institute of Te Dr.B.R.Ambedkar National Institute of Te 2018 - xi; 35p

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